Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone
Klesko, J. P., Bellow, J. A., Saly, M. J., Winter, C. H., Julin, J., & Sajavaara, T. (2016). Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone. Journal of Vacuum Science and Technology A, 34(5), Article 051515. https://doi.org/10.1116/1.4961385
Julkaistu sarjassa
Journal of Vacuum Science and Technology ATekijät
Päivämäärä
2016Tekijänoikeudet
© 2016 American Vacuum Society. Published by American Institute of Physics. Published in this repository with the kind permission of the publisher.
The atomic layer deposition (ALD) of films with the approximate compositions Mn3(BO3)2 and
CoB2O4 is described using MnTp2 or CoTp2 [Tp ¼ tris(pyrazolyl)borate] with ozone. The solid
state decomposition temperatures of MnTp2 and CoTp2 are 370 and 340 C, respectively.
Preparative-scale sublimations of MnTp2 and CoTp2 at 210 C/0.05 Torr afforded >99% recoveries
with <0.1% nonvolatile residues. Self-limited ALD growth was demonstrated at 325 C for MnTp2
or CoTp2 with ozone as the coreactant. The growth rate for the manganese borate process was
0.19 A˚ /cycle within the ALD window of 300–350 C. The growth rate for the cobalt borate process
was 0.39–0.42 A˚ /cycle at 325 C. X-ray diffraction of the as-deposited films indicated that they
were amorphous. Atomic force microscopy of 35–36 nm thick manganese borate films grown
within the 300–350 C ALD window showed root mean square surface roughnesses of 0.4–0.6 nm.
Film stoichiometries were assessed by x-ray photoelectron spectroscopy and time of flight-elastic
recoil detection analysis. The differing film stoichiometries obtained from the very similar precursors
MnTp2 and CoTp2 are proposed to arise from the oxidizing ability of the intermediate high
valent manganese oxide layers and lack thereof for cobalt.
...
Julkaisija
American Institute of Physics; American Vacuum SocietyISSN Hae Julkaisufoorumista
0734-2101Julkaisu tutkimustietojärjestelmässä
https://converis.jyu.fi/converis/portal/detail/Publication/26206636
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