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dc.contributor.authorHeiskanen, Samuli
dc.contributor.authorMaasilta, Ilari J.
dc.date.accessioned2020-12-16T09:18:15Z
dc.date.available2020-12-16T09:18:15Z
dc.date.issued2020
dc.identifier.citationHeiskanen, S., & Maasilta, I. J. (2020). Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing. <i>Applied Physics Letters</i>, <i>117</i>(23), Article 232601. <a href="https://doi.org/10.1063/5.0029273" target="_blank">https://doi.org/10.1063/5.0029273</a>
dc.identifier.otherCONVID_47352685
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/73252
dc.description.abstractSuperconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using standard lithographic techniques. In this study, we demonstrate a highly versatile method that allows for superconducting junctions to be fabricated on a more complex topography. It is based on maskless direct laser writing and two-photon lithography, which allows writing in 3D space. We show that high-quality normal metal–insulator–superconductor tunnel junctions can be fabricated on top of a 20-lm-tall three-dimensional topography. Combined with conformal resist coating methods, this technique could allow sub-micron device fabrication on almost any type of topography in the future.en
dc.format.mimetypeapplication/pdf
dc.languageeng
dc.language.isoeng
dc.publisherAmerican Institute of Physics
dc.relation.ispartofseriesApplied Physics Letters
dc.rightsIn Copyright
dc.subject.otherphononic crystal
dc.subject.othertemperature metrology
dc.subject.othersuperconductor-insulator-superconductor tunnel junction
dc.subject.otherquantum information
dc.subject.otherspin coating
dc.subject.othercryogenics
dc.subject.othermultiphoton lithography
dc.subject.otherrefrigerators
dc.subject.otherelectron tunneling
dc.titleSuperconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-202012167194
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.description.reviewstatuspeerReviewed
dc.relation.issn0003-6951
dc.relation.numberinseries23
dc.relation.volume117
dc.type.versionpublishedVersion
dc.rights.copyright© 2020 the Authors
dc.rights.accesslevelopenAccessfi
dc.subject.ysonanoelektroniikka
dc.subject.ysosuprajohteet
dc.subject.ysonanotekniikka
dc.format.contentfulltext
jyx.subject.urihttp://www.yso.fi/onto/yso/p26991
jyx.subject.urihttp://www.yso.fi/onto/yso/p9946
jyx.subject.urihttp://www.yso.fi/onto/yso/p11463
dc.rights.urlhttp://rightsstatements.org/page/InC/1.0/?language=en
dc.relation.doi10.1063/5.0029273


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