Tribological properties of thin films made by atomic layer deposition sliding against silicon
Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S.-P., Puurunen, R. L., & Ronkainen, H. (2018). Tribological properties of thin films made by atomic layer deposition sliding against silicon. Journal of Vacuum Science and Technology A, 36(1), Article 01A122. https://doi.org/10.1116/1.5003729
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Journal of Vacuum Science and Technology AAuthors
Date
2018Copyright
© Published by the AVS. Published in this repository with the kind permission of the publisher.
Interfacial phenomena, such as adhesion, friction, and wear, can dominate the performance and
reliability of microelectromechanical (MEMS) devices. Here, thin films made by atomic layer
deposition (ALD) were tested for their tribological properties. Tribological tests were carried out with
silicon counterpart sliding against ALD thin films in order to simulate the contacts occurring in the
MEMS devices. The counterpart was sliding in a linear reciprocating motion against the ALD films
with the total sliding distances of 5 and 20 m. Al2O3 and TiO2 coatings with different deposition
temperatures were investigated in addition to Al2O3-TiO2-nanolaminate, TiN, NbN, TiAlCN, a-C:H
[diamondlike carbon (DLC)] coatings, and uncoated Si. The formation of the tribolayer in the contact
area was the dominating phenomenon for friction and wear performance. Hardness, elastic modulus,
and crystallinity of the materials were also investigated. The nitride coatings had the most favorable
friction and wear performance of the ALD coatings, yet lower friction coefficient was measured with
DLC a-C:H coating. These results help us to take steps toward improved coating solutions in, e.g.,
MEMS applications
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