Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures
Putkonen, M., Heikkilä, P., Pasanen, A. T., Rautkoski, H., Svärd, L., Simell, P., Vähä-Nissi, M., & Sajavaara, T. (2018). Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. Journal of Vacuum Science and Technology A, 36(1), Article 01A102. https://doi.org/10.1116/1.4999826
Julkaistu sarjassa
Journal of Vacuum Science and Technology ATekijät
Päivämäärä
2018Tekijänoikeudet
© Published by the AVS. Published in this repository with the kind permission of the publisher.
Here, the authors report on the preparation of core–shell carbon-ceramic fibrous as well as ceramic
tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper,
ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated.
According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry,
carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of
the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl
alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based
PVA removal. Another approach utilized 200–400 nm thick carbon fibers prepared by electrospinning
from polyacrylonitrile and subsequent thermal treatment.
Julkaisija
AIP Publishing LLCISSN Hae Julkaisufoorumista
0734-2101Asiasanat
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https://converis.jyu.fi/converis/portal/detail/Publication/27317032
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