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dc.contributor.authorPutkonen, Matti
dc.contributor.authorHeikkilä, Pirjo
dc.contributor.authorPasanen, Antti T.
dc.contributor.authorRautkoski, Hille
dc.contributor.authorSvärd, Laura
dc.contributor.authorSimell, Pekka
dc.contributor.authorVähä-Nissi, Mika
dc.contributor.authorSajavaara, Timo
dc.date.accessioned2018-01-09T12:19:38Z
dc.date.available2018-10-01T21:35:27Z
dc.date.issued2018
dc.identifier.citationPutkonen, M., Heikkilä, P., Pasanen, A. T., Rautkoski, H., Svärd, L., Simell, P., . . . , & Sajavaara, T. (2018). Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. <em>Journal of Vacuum Science and Technology A</em>, 36 (1), 01A102. <a href="https://doi.org/10.1116/1.4999826">doi:10.1116/1.4999826</a>
dc.identifier.otherTUTKAID_75506
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/56652
dc.description.abstractHere, the authors report on the preparation of core–shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200–400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.
dc.language.isoeng
dc.publisherAIP Publishing LLC
dc.relation.ispartofseriesJournal of Vacuum Science and Technology A
dc.subject.otheratomic layer deposition
dc.subject.otherthin films
dc.subject.otherelectrospun fibers
dc.subject.otherfibrous and tubular catalyst
dc.subject.othersupport structures
dc.titleAtomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-201801021002
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.contributor.oppiaineFysiikka
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.date.updated2018-01-02T07:15:16Z
dc.type.coarjournal article
dc.description.reviewstatuspeerReviewed
dc.relation.issn0734-2101
dc.relation.volume36
dc.type.versionpublishedVersion
dc.rights.copyright© Published by the AVS. Published in this repository with the kind permission of the publisher.
dc.rights.accesslevelopenAccessfi
dc.relation.doi10.1116/1.4999826


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