The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge

Abstract

The relationship between Balmer-α and Fulcher-band emissions with extracted H + , H + 2 , and H + 3 ions is demonstrated for a 2.45 GHz microwave discharge. Ion mass spectra and optical measurements of Balmer-α and Fulcher-band emissions have been obtained with a Wien Filter having an optical viewport on the plasma chamber axis. The beam of approximately 1 mA is analyzed for different plasma conditions simultaneously with the measurement of light emissions both with temporal resolution. The use of visible light emissions as a valuable diagnostic tool for monitoring the species fraction of the extracted beams is proposed.