Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma
Megía-Macías, A., Cortázar, O. D., Tarvainen, O., & Koivisto, H. (2017). Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma. Physics of Plasmas, 24(11), Article 113501. https://doi.org/10.1063/1.5001488
Published inPhysics of Plasmas
© AIP Publishing, 2017. Published in this repository with the kind permission of the publisher.
A plasma diagnostic study of the Ion Energy Distribution Functions (IEDFs) of H+, H+2H2+, and H+3H3+ ions in a 2.45 GHz hydrogen plasma reactor called TIPS is presented. The measurements are conducted by using a Plasma Ion Mass Spectrometer with an energy sector and a quadrupole detector from HIDEN Analytical Limited in order to select an ion species and to measure its energy distribution. The reactor is operated in the pulsed mode at 100 Hz with a duty cycle of 10% (1 ms pulse width). The IEDFs of H+, H+2H2+, and H+3H3+ are obtained each 5 μs with 1 μs time resolution throughout the entire pulse. The temporal evolution of the plasma potential and ion temperature of H+ is derived from the data. It is shown that the plasma potential is within the range of 15–20 V, while the ion temperature reaches values of 0.25–1 eV during the pulse and exhibits a fast transient peak when the microwave radiation is switched off. Finally, the ion temperatures are used to predict the transverse thermal emittance of a proton beam extracted from 2.45 GHz microwave discharges. ...
PublisherAIP Publishing LLC
Publication in research information system
MetadataShow full item record
Related funder(s)European Commission
The content of the publication reflects only the author’s view. The funder is not responsible for any use that may be made of the information it contains.
Additional information about fundingThis project received funding from the European Union’s Horizon 2020 research and innovation programme under Grant Agreement No. 654002.
Showing items with similar title or keywords.
Izotov, Ivan; Tarvainen, Olli; Skalyga, Vadim; Mansfeld, Dmitry; Kalvas, Taneli; Koivisto, Hannu; Kronholm, Risto (IOP Publishing, 2018)The measurement of the electron energy distribution (EED) of electrons escaping axially from a minimum-B electron cyclotron resonance ion source (ECRIS) is reported. The experimental data were recorded with a room-temperature ...
A study of VUV emission and the extracted electron-ion ratio in hydrogen and deuterium plasmas of a filament-driven H−/D− ion source Komppula, J.; Tarvainen, O.; Kalvas, T.; Koivisto, H.; Myllyperkiö, P.; Toivanen, V. (AIP Publishing LLC, 2019)Vacuum ultraviolet (VUV) emission diagnostics for studying differences of electron impact processes in hydrogen and deuterium plasmas are presented. The method is applied to study a filament driven multicusp arc discharge ...
Komppula, Jani (University of Jyväskylä, 2015)
The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge Cortázar, O. D.; Megía-Macías, A.; Tarvainen, Olli; Kalvas, Taneli; Koivisto, Hannu (American Institute of Physics, 2015)The relationship between Balmer-α and Fulcher-band emissions with extracted H + , H + 2 , and H + 3 ions is demonstrated for a 2.45 GHz microwave discharge. Ion mass spectra and optical measurements of Balmer-α ...
Correlations between density distributions, optical spectra, and ion species in a hydrogen plasma (invited) Cortázar, O. D.; Megía-Macías, A.; Tarvainen, Olli; Kalvas, Taneli; Koivisto, Hannu (American Institute of Physics, 2016)An experimental study of plasma distributions in a 2.45 GHz hydrogen discharge operated at 100 Hz repetition rate is presented. Ultrafast photography, time integrated visible light emission spectra, time resolved ...