The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon
Shakespeare, C., Loippo, T., Lyyra, H., & Muhonen, J. T. (2021). The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon. Materials for Quantum Technology, 1(4), Article 045003. https://doi.org/10.1088/2633-4356/ac3e42
Julkaistu sarjassa
Materials for Quantum TechnologyPäivämäärä
2021Tekijänoikeudet
© 2021 The Author(s). Published by IOP Publishing Ltd
Optomechanical resonators were fabricated on a silicon-on-insulator substrate that had been implanted with phosphorus donors. The resonators' mechanical and optical properties were then measured (at 6 K and room temperature) before and after the substrate was annealed. All measured resonators survived the annealing and their mechanical linewidths decreased while their optical and mechanical frequencies increased. This is consistent with crystal lattice damage from the ion implantation causing the optical and mechanical properties to degrade and then subsequently being repaired by the annealing. We explain these effects qualitatively with changes in the silicon crystal lattice structure. We also report on some unexplained features in the pre-anneal samples. In addition, we report partial fabrication of optomechanical resonators with neon ion milling.
Julkaisija
IOP PublishingISSN Hae Julkaisufoorumista
2633-4356Julkaisu tutkimustietojärjestelmässä
https://converis.jyu.fi/converis/portal/detail/Publication/104052404
Metadata
Näytä kaikki kuvailutiedotKokoelmat
Rahoittaja(t)
Suomen Akatemia; Euroopan komissioRahoitusohjelmat(t)
Akatemiatutkija, SA
The content of the publication reflects only the author’s view. The funder is not responsible for any use that may be made of the information it contains.
Lisätietoja rahoituksesta
This project has received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (Grant Agreement No. 852428), from Academy of Finland Grant No. 321416 and Jenny and Antti Wihuri Foundation.Lisenssi
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