dc.contributor.author | Shakespeare, Cliona | |
dc.contributor.author | Loippo, Teemu | |
dc.contributor.author | Lyyra, Henri | |
dc.contributor.author | Muhonen, Juha T. | |
dc.date.accessioned | 2022-01-31T10:26:08Z | |
dc.date.available | 2022-01-31T10:26:08Z | |
dc.date.issued | 2021 | |
dc.identifier.citation | Shakespeare, C., Loippo, T., Lyyra, H., & Muhonen, J. T. (2021). The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon. <i>Materials for Quantum Technology</i>, <i>1</i>(4), Article 045003. <a href="https://doi.org/10.1088/2633-4356/ac3e42" target="_blank">https://doi.org/10.1088/2633-4356/ac3e42</a> | |
dc.identifier.other | CONVID_104052404 | |
dc.identifier.uri | https://jyx.jyu.fi/handle/123456789/79576 | |
dc.description.abstract | Optomechanical resonators were fabricated on a silicon-on-insulator substrate that had been implanted with phosphorus donors. The resonators' mechanical and optical properties were then measured (at 6 K and room temperature) before and after the substrate was annealed. All measured resonators survived the annealing and their mechanical linewidths decreased while their optical and mechanical frequencies increased. This is consistent with crystal lattice damage from the ion implantation causing the optical and mechanical properties to degrade and then subsequently being repaired by the annealing. We explain these effects qualitatively with changes in the silicon crystal lattice structure. We also report on some unexplained features in the pre-anneal samples. In addition, we report partial fabrication of optomechanical resonators with neon ion milling. | en |
dc.format.mimetype | application/pdf | |
dc.language.iso | eng | |
dc.publisher | IOP Publishing | |
dc.relation.ispartofseries | Materials for Quantum Technology | |
dc.rights | CC BY 4.0 | |
dc.subject.other | photonic crystal | |
dc.subject.other | ion implantation | |
dc.subject.other | optomechanics | |
dc.subject.other | silicon | |
dc.subject.other | nanomechanical resonator | |
dc.title | The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon | |
dc.type | research article | |
dc.identifier.urn | URN:NBN:fi:jyu-202201311343 | |
dc.contributor.laitos | Fysiikan laitos | fi |
dc.contributor.laitos | Department of Physics | en |
dc.contributor.oppiaine | Nanoscience Center | fi |
dc.contributor.oppiaine | Nanoscience Center | en |
dc.type.uri | http://purl.org/eprint/type/JournalArticle | |
dc.type.coar | http://purl.org/coar/resource_type/c_2df8fbb1 | |
dc.description.reviewstatus | peerReviewed | |
dc.relation.issn | 2633-4356 | |
dc.relation.numberinseries | 4 | |
dc.relation.volume | 1 | |
dc.type.version | publishedVersion | |
dc.rights.copyright | © 2021 The Author(s). Published by IOP Publishing Ltd | |
dc.rights.accesslevel | openAccess | fi |
dc.type.publication | article | |
dc.relation.grantnumber | 321416 | |
dc.relation.grantnumber | 852428 | |
dc.relation.grantnumber | 852428 | |
dc.relation.projectid | info:eu-repo/grantAgreement/EC/H2020/852428/EU//QBusSi | |
dc.format.content | fulltext | |
dc.rights.url | https://creativecommons.org/licenses/by/4.0/ | |
dc.relation.doi | 10.1088/2633-4356/ac3e42 | |
dc.relation.funder | Research Council of Finland | en |
dc.relation.funder | European Commission | en |
dc.relation.funder | Suomen Akatemia | fi |
dc.relation.funder | Euroopan komissio | fi |
jyx.fundingprogram | Academy Research Fellow, AoF | en |
jyx.fundingprogram | ERC Starting Grant | en |
jyx.fundingprogram | Akatemiatutkija, SA | fi |
jyx.fundingprogram | ERC Starting Grant | fi |
jyx.fundinginformation | This project has received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (Grant Agreement No. 852428), from Academy of Finland Grant No. 321416 and Jenny and Antti Wihuri Foundation. | |
dc.type.okm | A1 | |