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dc.contributor.authorWłodarski, M.
dc.contributor.authorChodorow, U.
dc.contributor.authorJóźwiak, S.
dc.contributor.authorPutkonen, M.
dc.contributor.authorDurejko, T.
dc.contributor.authorSajavaara, T.
dc.contributor.authorNorek, M.
dc.date.accessioned2019-10-11T12:03:01Z
dc.date.available2019-10-11T12:03:01Z
dc.date.issued2019
dc.identifier.citationWłodarski, M., Chodorow, U., Jóźwiak, S., Putkonen, M., Durejko, T., Sajavaara, T., & Norek, M. (2019). Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments. <i>Materials</i>, <i>12</i>(19), Article 3212. <a href="https://doi.org/10.3390/ma12193212" target="_blank">https://doi.org/10.3390/ma12193212</a>
dc.identifier.otherCONVID_33093735
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/65824
dc.description.abstractThe structural and optical evolution of the ZnS thin films prepared by atomic layer deposition (ALD) from the diethylzinc (DEZ) and 1,5-pentanedithiol (PDT) as zinc and sulfur precursors was studied. A deposited ZnS layer (of about 60 nm) is amorphous, with a significant S excess. After annealing, the stoichiometry improved for annealing temperatures ≥400 °C and annealing time ≥2 h, and 1:1 stoichiometry was obtained when annealed at 500 °C for 4 h. ZnS crystallized into small crystallites (1–7 nm) with cubic sphalerite structure, which remained stable under the applied annealing conditions. The size of the crystallites (D) tended to decrease with annealing temperature, in agreement with the EDS data (decreased content of both S and Zn with annealing temperature); the D for samples annealed at 600 °C (for the time ≤2 h) was always the smallest. Both reflectivity and ellipsometric spectra showed characteristics typical for quantum confinement (distinct dips/peaks in UV spectral region). It can thus be concluded that the amorphous ZnS layer obtained at a relatively low temperature (150 °C) from organic S precursor transformed into the layers built of small ZnS nanocrystals of cubic structure after annealing at a temperature range of 300–600 °C under Ar atmosphere.en
dc.format.mimetypeapplication/pdf
dc.languageeng
dc.language.isoeng
dc.publisherMDPI AG
dc.relation.ispartofseriesMaterials
dc.rightsCC BY 4.0
dc.subject.otheratomic layer deposition (ALD)
dc.subject.otherZnS thin films
dc.subject.otherannealing
dc.subject.otheroptical properties
dc.titleStructural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-201910114402
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.contributor.oppiaineFysiikkafi
dc.contributor.oppiaineKiihdytinlaboratoriofi
dc.contributor.oppiainePhysicsen
dc.contributor.oppiaineAccelerator Laboratoryen
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.type.coarhttp://purl.org/coar/resource_type/c_2df8fbb1
dc.description.reviewstatuspeerReviewed
dc.relation.issn1996-1944
dc.relation.numberinseries19
dc.relation.volume12
dc.type.versionpublishedVersion
dc.rights.copyright© 2019 by the authors
dc.rights.accesslevelopenAccessfi
dc.subject.ysoohutkalvot
dc.subject.ysoatomikerroskasvatus
dc.format.contentfulltext
jyx.subject.urihttp://www.yso.fi/onto/yso/p16644
jyx.subject.urihttp://www.yso.fi/onto/yso/p27468
dc.rights.urlhttps://creativecommons.org/licenses/by/4.0/
dc.relation.doi10.3390/ma12193212
jyx.fundinginformationThe Ministry of National Defense Republic of Poland Program-Research Grant Military University of Technology project 13-995 supported this work. MP acknowledges funding from the Academy of Finland by the profiling action on Matter and Materials, grant no. 318913 and the through the project grant no. 288212.
dc.type.okmA1


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