Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures
Abstract
Here, the authors report on the preparation of core–shell carbon-ceramic fibrous as well as ceramic
tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper,
ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated.
According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry,
carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of
the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl
alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based
PVA removal. Another approach utilized 200–400 nm thick carbon fibers prepared by electrospinning
from polyacrylonitrile and subsequent thermal treatment.
Main Authors
Format
Articles
Research article
Published
2018
Series
Subjects
Publication in research information system
Publisher
AIP Publishing LLC
The permanent address of the publication
https://urn.fi/URN:NBN:fi:jyu-201801021002Use this for linking
Review status
Peer reviewed
ISSN
0734-2101
DOI
https://doi.org/10.1116/1.4999826
Language
English
Published in
Journal of Vacuum Science and Technology A
Citation
- Putkonen, M., Heikkilä, P., Pasanen, A. T., Rautkoski, H., Svärd, L., Simell, P., Vähä-Nissi, M., & Sajavaara, T. (2018). Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. Journal of Vacuum Science and Technology A, 36(1), Article 01A102. https://doi.org/10.1116/1.4999826
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