Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Abstract
Here, the authors report on the preparation of core–shell carbon-ceramic fibrous as well as ceramic tubular catalyst supports utilizing electrospinning and atomic layer deposition (ALD). In this paper, ALD of Ti-Nb-O thin films using TiCl4, Nb(OEt)5, and H2O as precursors is demonstrated. According to the time-of-flight-elastic recoil detection analysis and Rutherford backscattering spectrometry, carbon and hydrogen impurities were relatively low, but depend on the pulsing ratio of the precursors. Optimized ALD process was used for coating of sacrificial electrospun polyvinyl alcohol (PVA) template fibers to yield tubular Ti-Nb-O structures after thermal or solution based PVA removal. Another approach utilized 200–400 nm thick carbon fibers prepared by electrospinning from polyacrylonitrile and subsequent thermal treatment.
Main Authors
Format
Articles Research article
Published
2018
Series
Subjects
Publication in research information system
Publisher
AIP Publishing LLC
The permanent address of the publication
https://urn.fi/URN:NBN:fi:jyu-201801021002Use this for linking
Review status
Peer reviewed
ISSN
0734-2101
DOI
https://doi.org/10.1116/1.4999826
Language
English
Published in
Journal of Vacuum Science and Technology A
Citation
  • Putkonen, M., Heikkilä, P., Pasanen, A. T., Rautkoski, H., Svärd, L., Simell, P., Vähä-Nissi, M., & Sajavaara, T. (2018). Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures. Journal of Vacuum Science and Technology A, 36(1), Article 01A102. https://doi.org/10.1116/1.4999826
License
Open Access
Copyright© Published by the AVS. Published in this repository with the kind permission of the publisher.

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