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dc.contributor.authorLaitinen, Mikko
dc.contributor.authorRossi, Mikko
dc.contributor.authorJulin, Jaakko
dc.contributor.authorSajavaara, Timo
dc.date.accessioned2015-01-30T07:57:06Z
dc.date.available2015-01-30T07:57:06Z
dc.date.issued2014
dc.identifier.citationLaitinen, M., Rossi, M., Julin, J., & Sajavaara, T. (2014). Time-of-flight - Energy spectrometer for elemental depth profiling - Jyväskylä design. <em>Nuclear instruments and methods in physics research section B: beam interactions with materials and atoms</em>, 337, 55-61. <a href="http://dx.doi.org/10.1016/j.nimb.2014.07.001">doi:10.1016/j.nimb.2014.07.001</a>
dc.identifier.otherTUTKAID_62625
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/45198
dc.description.abstractA new time-of-flight elastic recoil detection spectrometer has been built, and initially the main effort was focused in getting good timing resolution and high detection efficiency for light elements. With the ready system, a 154 ps timing resolution was recorded for scattered 4.8 MeV 4He2+ ions. The hydrogen detection efficiency was from 80% to 20% for energies from 100 keV to 1 MeV, respectively, and this was achieved by having an additional atomic layer deposited Al2O3 coating on the first timing detector’s carbon foil. The data acquisition system utilizes an FPGA-card to time-stamp every time-of-flight and energy event with 25 ns resolution. The different origins of the background events in coincident time-of-flight-energy histograms have been studied and explained. The built system has proved to be able to routinely depth profile films thinner than 10 nm.
dc.language.isoeng
dc.publisherElsevier BV
dc.relation.ispartofseriesNuclear instruments and methods in physics research section B: beam interactions with materials and atoms
dc.subject.otherelemental depth profilingen
dc.subject.otherion beam analysisen
dc.subject.othertime-of-flighten
dc.subject.othertiming gateen
dc.subject.otherToF-ERDAen
dc.titleTime-of-flight - Energy spectrometer for elemental depth profiling - Jyväskylä design
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-201501211155
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.contributor.oppiaineFysiikka
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.date.updated2015-01-21T16:30:03Z
dc.type.coarjournal article
dc.description.reviewstatuspeerReviewed
dc.format.pagerange55-61
dc.relation.issn0168-583X
dc.relation.numberinseries-
dc.relation.volume337
dc.type.versionacceptedVersion
dc.rights.copyright© 2014 Elsevier B.V. This is an author's final draft version of an article whose final and definitive form has been published by Elsevier. Published in this repository with the kind permission of the publisher.
dc.rights.accesslevelopenAccessfi
dc.relation.doi10.1016/j.nimb.2014.07.001


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