Nanofabrication on 2D and 3D Topography via Positive‐Tone Direct‐Write Laser Lithography
Heiskanen, S., Geng, Z., Mastomäki, J., & Maasilta, I. J. (2020). Nanofabrication on 2D and 3D Topography via Positive‐Tone Direct‐Write Laser Lithography. Advanced Engineering Materials, 22(2), Article 1901290. https://doi.org/10.1002/adem.201901290
Published inAdvanced Engineering Materials
© 2019 WILEY‐VCH Verlag GmbH & Co. KGaA
Direct laser writing (DLW) lithography using two‐photon absorption is a powerful technique mostly used for fabrication of complex structures in micro‐ and nanoscale, by photopolymerizing a negative‐tone resist. In contrast, in this study it is demonstrated that DLW is also well suited for fabricating nano‐ to microscale metallic structures using lift‐off and a positive‐tone photoresist. It is shown first that versatile, fast and large area fabrication is possible on flat two‐dimensional insulating substrates, and an expression for how the line width varies with the scanning speed is derived, with excellent agreement with the experiments. Even more interestingly, a unique application for the DLW lift‐off process is demonstrated, by fabricating sub‐micron scale metallic wiring on uneven substrates with sloping elevation changes as high as 20 µm. Such fabrication is practically impossible with more standard lithographic techniques.
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Related funder(s)Academy of Finland
Funding program(s)Academy Project, AoF
Additional information about fundingAcademy of Finland. Grant Number: 298667
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