Development of a MeV ion beam lithography system in Jyväskylä
Gorelick, S., Ylimäki, T., Sajavaara, T., Laitinen, M., & Whitlow, H. (2007). Development of a MeV ion beam lithography system in Jyväskylä. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 260(1), 77-80. https://doi.org/10.1016/j.nimb.2007.01.260
Julkaistu sarjassa
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and AtomsPäivämäärä
2007Tekijänoikeudet
© 2007 Elsevier B.V. This is a final draft version of an article whose final and definitive form has been published by Elsevier. Published in this repository with the kind permission of the publisher.
A lithographic facility for writing patterns with ion beams from cyclotron beams is under development for the Jyväskylä cyclotron. Instead of focusing and deflecting the beam with electrostatic and magnetic fields a different approach is used. Here a small rectangular beam spot is defined by the shadow of a computer-controlled variable aperture in close proximity to the sample. This allows parallel exposure of rectangular pattern elements of 5–500 μm side with protons up to 6 MeV and heavy ions (20Ne, 85Kr) up to few 100 MeV. Here we present a short overview of the system under construction and development of the aperture design, which is a critical aspect for all ion beam lithography systems.
Julkaisija
Elsevier BVISSN Hae Julkaisufoorumista
0168-583XJulkaisu tutkimustietojärjestelmässä
https://converis.jyu.fi/converis/portal/detail/Publication/17714408
Metadata
Näytä kaikki kuvailutiedotKokoelmat
Samankaltainen aineisto
Näytetään aineistoja, joilla on samankaltainen nimeke tai asiasanat.
-
Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system
Rojas Rojas, Laura (2012)Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes ... -
Zone of Proximal Development (ZPD) as an emergent system : A dynamic systems theory perspective
Karimi Aghdam, Saeed (Springer New York LLC, 2017)This paper sets out to present a novel construal of one of the notions of Vygotskian cultural-historical theory viz., zone of proximal development (ZPD) drawing upon dynamic systems theory. The principal thesis maintains ... -
Developing a metatheoretical framework for second language development : a cultural-historical theory and dynamic systems theory perspective
Karimi-Aghdam-Ordaklou, Saeed (University of Jyväskylä, 2017)The main aim of this article-based dissertation is to construct and articulate a dialectical metatheoretical architecture for the study of second language development termed Purposive-Historical Systems Theory (PHiST) ... -
Development of economic MeV-ion microbeam technology at Chiang Mai University
Singkarat, S.; Puttaraksa, Nitipon; Unai, S.; Yu, L.D.; Singkarat, K.; Pussadee, N.; Whitlow, H.J.; Natyanum, S.; Tippawan, U. (Elsevier, 2017)Developing high technologies but in economic manners is necessary and also feasible for developing countries. At Chiang Mai University, Thailand, we have developed MeV-ion microbeam technology based on a 1.7-MV Tandetron ... -
Development of a microfluidic design for an automatic lab-on-chip operation
Puttaraksa, Nitipon; Whitlow, Harry J.; Napari, Mari; Meriläinen, Leena; Gilbert, Leona (Springer, 2016)Simple and easy to use are the keys for developing lab-on-chip technology. Here, a new microfluidic circuit has been designed for an automatic lab-on-chip operation (ALOCO) device. This chip used capillary forces for ...
Ellei toisin mainittu, julkisesti saatavilla olevia JYX-metatietoja (poislukien tiivistelmät) saa vapaasti uudelleenkäyttää CC0-lisenssillä.