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dc.contributor.authorGorelick, Sergey
dc.contributor.authorYlimäki, Tommi
dc.contributor.authorSajavaara, Timo
dc.contributor.authorLaitinen, Mikko
dc.contributor.authorWhitlow, Harry
dc.date.accessioned2017-06-30T06:20:44Z
dc.date.available2017-06-30T06:20:44Z
dc.date.issued2007
dc.identifier.citationGorelick, S., Ylimäki, T., Sajavaara, T., Laitinen, M., & Whitlow, H. (2007). Development of a MeV ion beam lithography system in Jyväskylä. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>, <i>260</i>(1), 77-80. <a href="https://doi.org/10.1016/j.nimb.2007.01.260" target="_blank">https://doi.org/10.1016/j.nimb.2007.01.260</a>
dc.identifier.otherCONVID_17714408
dc.identifier.otherTUTKAID_30096
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/54764
dc.description.abstractA lithographic facility for writing patterns with ion beams from cyclotron beams is under development for the Jyväskylä cyclotron. Instead of focusing and deflecting the beam with electrostatic and magnetic fields a different approach is used. Here a small rectangular beam spot is defined by the shadow of a computer-controlled variable aperture in close proximity to the sample. This allows parallel exposure of rectangular pattern elements of 5–500 μm side with protons up to 6 MeV and heavy ions (20Ne, 85Kr) up to few 100 MeV. Here we present a short overview of the system under construction and development of the aperture design, which is a critical aspect for all ion beam lithography systems.
dc.language.isoeng
dc.publisherElsevier BV
dc.relation.ispartofseriesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
dc.subject.otherMeV ion beam lithography
dc.subject.othercyclotron
dc.subject.otherproximity aperture
dc.subject.otherproton beam writing
dc.titleDevelopment of a MeV ion beam lithography system in Jyväskylä
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-201706283147
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.date.updated2017-06-28T03:18:31Z
dc.type.coarhttp://purl.org/coar/resource_type/c_2df8fbb1
dc.description.reviewstatuspeerReviewed
dc.format.pagerange77-80
dc.relation.issn0168-583X
dc.relation.numberinseries1
dc.relation.volume260
dc.type.versionacceptedVersion
dc.rights.copyright© 2007 Elsevier B.V. This is a final draft version of an article whose final and definitive form has been published by Elsevier. Published in this repository with the kind permission of the publisher.
dc.rights.accesslevelopenAccessfi
dc.relation.doi10.1016/j.nimb.2007.01.260
dc.type.okmA1


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