University of Jyväskylä | JYX Digital Repository

  • English  | Give feedback |
    • suomi
    • English
 
  • Login
JavaScript is disabled for your browser. Some features of this site may not work without it.
View Item 
  • JYX
  • Opinnäytteet
  • Pro gradu -tutkielmat
  • View Item
JYX > Opinnäytteet > Pro gradu -tutkielmat > View Item

Fabrication of microfluidic devices through deep wet etching

Thumbnail
View/Open
987.8Kb

Downloads:  
Show download detailsHide download details  
Authors
Öçal, Süha
Date
2019
Discipline
Solu- ja molekyylibiologiaCell and molecular biology
Copyright
This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.

 
Soda-lime glass is a commonly used, cheap and accessible material. Just like any other glass, it offers unique optical properties. Most of the incoming light is transmitted through the glass, which makes soda-lime an attractive material to be used in analytical and observational purposes. For this reason, glass is an excellent source material for microfluidics practices. Microfluidics is the manipulation of the fluids in micro-scales; enclosed microfluidic systems offers a variety of possibilities in biochemical research, since most bio mechanism operate on micro-scale. However, fabrication of microfluidic systems offer challenges. In this paper, multiple fabrication methods was attempted to create a microfluidic device that can be utilized in cell sorting purposes. Hydrofluoric acid (HF) is a strong chemical and it is commonly practiced to generate patterns on glass-based materials. To withstand HF, glass surface was covered with either chromium or gold. In this experiment, two different concentrations of HF were tested; 6% and 48% HF. Generation of deep patterns were consuming excessive time with 6% HF, protective mask was unable to withstand the harsh conditions. On the other hand, increasing the concentration by eightfold decreased the time consumption by 47 times. Main findings of this study was the usage of high concentration of HF and application of gold layer, chromium layer was not durable enough. Flow was generated successfully within the device, sample beads were transported effortlessly. Many of the reported methods in this paper can be improved; however, a working fabrication method was developed. ...
Keywords
depth profile HF metal deposition surface preparation thermal bonding mikrofluidistiikka litografia kulta lasi kromi microfluidics lithography gold glass chromium
URI

http://urn.fi/URN:NBN:fi:jyu-202001071054

Metadata
Show full item record
Collections
  • Pro gradu -tutkielmat [23381]

Related items

Showing items with similar title or keywords.

  • Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system 

    Rojas Rojas, Laura (2012)
    Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes ...
  • Studies of two-dimensional and three-dimensional phononic crystal structures 

    Tian, Yolan (University of Jyväskylä, 2016)
    This thesis focuses on studying phononic crystal structures. More specifically, it is aimed at fabrication and measurement of thermal properties of two-dimensional (2D) periodic microstructures and three-dimensional (3D) ...
  • Applications of DNA self-assembled structures in nanoelectronics and plasmonics 

    Shen, Boxuan (University of Jyväskylä, 2018)
    In this thesis, the potential applications of DNA self-assembled structures were explored in both nanoelectronics and plasmonics. The works can be divided into two parts: electrical characterization of unmodified multilayered ...
  • Fabrication of a gap structure for near-field heat transfer 

    Heiskanen, Samuli (2016)
    Tutkimuksessa kehitettiin kahden vaiheen valmistusprosessi rakorakenteen valmistamiseen, jossa on metallista valmistetut johdot. Tämä rakorakenne on tarkoitettu lähikentän lämmönsiirtymisen mittaamiseen. Valmistus tehtiin ...
  • Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing 

    Heiskanen, Samuli; Maasilta, Ilari J. (American Institute of Physics, 2020)
    Superconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using ...
  • Browse materials
  • Browse materials
  • Articles
  • Conferences and seminars
  • Electronic books
  • Historical maps
  • Journals
  • Tunes and musical notes
  • Photographs
  • Presentations and posters
  • Publication series
  • Research reports
  • Research data
  • Study materials
  • Theses

Browse

All of JYXCollection listBy Issue DateAuthorsSubjectsPublished inDepartmentDiscipline

My Account

Login

Statistics

View Usage Statistics
  • How to publish in JYX?
  • Self-archiving
  • Publish Your Thesis Online
  • Publishing Your Dissertation
  • Publication services

Open Science at the JYU
 
Data Protection Description

Accessibility Statement

Unless otherwise specified, publicly available JYX metadata (excluding abstracts) may be freely reused under the CC0 waiver.
Open Science Centre