Fabrication of microfluidic devices through deep wet etching
This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.
Soda-lime glass is a commonly used, cheap and accessible material. Just like any other glass, it offers unique optical properties. Most of the incoming light is transmitted through the glass, which makes soda-lime an attractive material to be used in analytical and observational purposes. For this reason, glass is an excellent source material for microfluidics practices. Microfluidics is the manipulation of the fluids in micro-scales; enclosed microfluidic systems offers a variety of possibilities in biochemical research, since most bio mechanism operate on micro-scale. However, fabrication of microfluidic systems offer challenges. In this paper, multiple fabrication methods was attempted to create a microfluidic device that can be utilized in cell sorting purposes. Hydrofluoric acid (HF) is a strong chemical and it is commonly practiced to generate patterns on glass-based materials. To withstand HF, glass surface was covered with either chromium or gold. In this experiment, two different concentrations of HF were tested; 6% and 48% HF. Generation of deep patterns were consuming excessive time with 6% HF, protective mask was unable to withstand the harsh conditions. On the other hand, increasing the concentration by eightfold decreased the time consumption by 47 times. Main findings of this study was the usage of high concentration of HF and application of gold layer, chromium layer was not durable enough. Flow was generated successfully within the device, sample beads were transported effortlessly. Many of the reported methods in this paper can be improved; however, a working fabrication method was developed. ...
MetadataShow full item record
- Pro gradu -tutkielmat 
Showing items with similar title or keywords.
Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system Rojas Rojas, Laura (2012)Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes ...
Heiskanen, Samuli (2016)Tutkimuksessa kehitettiin kahden vaiheen valmistusprosessi rakorakenteen valmistamiseen, jossa on metallista valmistetut johdot. Tämä rakorakenne on tarkoitettu lähikentän lämmönsiirtymisen mittaamiseen. Valmistus tehtiin ...
Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing Heiskanen, Samuli; Maasilta, Ilari J. (American Institute of Physics, 2020)Superconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using ...
Puttaraksa, Nitipon; Whitlow, Harry J.; Napari, Mari; Meriläinen, Leena; Gilbert, Leona (Springer, 2016)Simple and easy to use are the keys for developing lab-on-chip technology. Here, a new microfluidic circuit has been designed for an automatic lab-on-chip operation (ALOCO) device. This chip used capillary forces for ...
Isotalo, Tero (2007)