Näytä suppeat kuvailutiedot

dc.contributor.authorMegía-Macías, A.
dc.contributor.authorCortázar, O. D.
dc.contributor.authorTarvainen, Olli
dc.contributor.authorKoivisto, Hannu
dc.date.accessioned2017-11-16T10:36:57Z
dc.date.available2018-10-01T21:35:27Z
dc.date.issued2017
dc.identifier.citationMegía-Macías, A., Cortázar, O. D., Tarvainen, O., & Koivisto, H. (2017). Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma. <em>Physics of Plasmas</em>, 24 (11), 113501. <a href="https://doi.org/10.1063/1.5001488">doi:10.1063/1.5001488</a>
dc.identifier.otherTUTKAID_75688
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/55900
dc.description.abstractA plasma diagnostic study of the Ion Energy Distribution Functions (IEDFs) of H+, H+2H2+, and H+3H3+ ions in a 2.45 GHz hydrogen plasma reactor called TIPS is presented. The measurements are conducted by using a Plasma Ion Mass Spectrometer with an energy sector and a quadrupole detector from HIDEN Analytical Limited in order to select an ion species and to measure its energy distribution. The reactor is operated in the pulsed mode at 100 Hz with a duty cycle of 10% (1 ms pulse width). The IEDFs of H+, H+2H2+, and H+3H3+ are obtained each 5 μs with 1 μs time resolution throughout the entire pulse. The temporal evolution of the plasma potential and ion temperature of H+ is derived from the data. It is shown that the plasma potential is within the range of 15–20 V, while the ion temperature reaches values of 0.25–1 eV during the pulse and exhibits a fast transient peak when the microwave radiation is switched off. Finally, the ion temperatures are used to predict the transverse thermal emittance of a proton beam extracted from 2.45 GHz microwave discharges.
dc.language.isoeng
dc.publisherAIP Publishing LLC
dc.relation.ispartofseriesPhysics of Plasmas
dc.subject.otherplasma dynamics
dc.subject.otherplasma diagnostics
dc.subject.otherion
dc.subject.otherplasma sources
dc.subject.otherplasma sheaths
dc.titleTime resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma
dc.typearticle
dc.identifier.urnURN:NBN:fi:jyu-201711144250
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.type.urihttp://purl.org/eprint/type/JournalArticle
dc.identifier.doi10.1063/1.5001488
dc.date.updated2017-11-14T13:15:08Z
dc.type.coarjournal article
dc.description.reviewstatuspeerReviewed
dc.relation.issn1070-664X
dc.relation.volume24
dc.type.versionpublishedVersion
dc.rights.copyright© AIP Publishing, 2017. Published in this repository with the kind permission of the publisher.
dc.rights.accesslevelopenAccessfi


Aineistoon kuuluvat tiedostot

Thumbnail

Aineisto kuuluu seuraaviin kokoelmiin

Näytä suppeat kuvailutiedot