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dc.contributor.authorMelanson, Stephane
dc.contributor.authorDehnel, Morgan
dc.contributor.authorPotkins, Dave
dc.contributor.authorMcDonald, Hamish
dc.contributor.authorHollinger, Craig
dc.contributor.authorTheroux, Joseph
dc.contributor.authorMartin, Jeff
dc.contributor.authorStewart, Thomas
dc.contributor.authorJackle, Philip
dc.contributor.authorPhilpott, Chris
dc.contributor.authorJones, Tobin
dc.contributor.authorKalvas, Taneli
dc.contributor.authorTarvainen, Olli
dc.contributor.editorFaircloth, Dan
dc.date.accessioned2017-09-04T10:45:12Z
dc.date.available2018-09-02T21:35:34Z
dc.date.issued2017
dc.identifier.citationMelanson, S., Dehnel, M., Potkins, D., McDonald, H., Hollinger, C., Theroux, J., Martin, J., Stewart, T., Jackle, P., Philpott, C., Jones, T., Kalvas, T., & Tarvainen, O. (2017). The extraction of negative carbon ions from a volume cusp ion source. In D. Faircloth (Ed.), <i>NIBS 2016 : Fifth International Symposium on Negative Ions, Beams and Sources</i> (Article 040001). AIP Publishing. AIP Conference Proceedings, 1869. <a href="https://doi.org/10.1063/1.4995777" target="_blank">https://doi.org/10.1063/1.4995777</a>
dc.identifier.otherCONVID_27188375
dc.identifier.otherTUTKAID_74819
dc.identifier.urihttps://jyx.jyu.fi/handle/123456789/55267
dc.description.abstractAcetylene and carbon dioxide gases are used in a filament-powered volume-cusp ion source to produce negative carbon ions for the purpose of carbon implantation for gettering applications. The beam was extracted to an energy of 25 keV and the composition was analyzed with a spectrometer system consisting of a 90° dipole magnet and a pair of slits. It is found that acetylene produces mostly C−2 ions (up to 92 µA), while carbon dioxide produces mostly O− with only trace amounts of C−. Maximum C−2 current was achieved with 400 W of arc power and, the beam current and composition were found to be highly dependent on the pressure in the source. The beam properties as a function of source settings are analyzed, and plasma properties are measured with a Langmuir probe. Finally, we describe testing of a new RF H− ion source, found to produce more than 6 mA of CW H− beam.
dc.language.isoeng
dc.publisherAIP Publishing
dc.relation.ispartofNIBS 2016 : Fifth International Symposium on Negative Ions, Beams and Sources
dc.relation.ispartofseriesAIP Conference Proceedings
dc.subject.otherion sources
dc.subject.othervolume cusp ion source
dc.subject.othercarbon ions
dc.titleThe extraction of negative carbon ions from a volume cusp ion source
dc.typeconferenceObject
dc.identifier.urnURN:NBN:fi:jyu-201709043653
dc.contributor.laitosFysiikan laitosfi
dc.contributor.laitosDepartment of Physicsen
dc.type.urihttp://purl.org/eprint/type/ConferencePaper
dc.date.updated2017-09-04T09:15:14Z
dc.relation.isbn978-0-7354-1549-2
dc.type.coarconference paper
dc.description.reviewstatuspeerReviewed
dc.relation.issn0094-243X
dc.type.versionpublishedVersion
dc.rights.copyrightCopyright © 2017, AIP Publishing LLC. Published in this repository with the kind permission of the publisher.
dc.rights.accesslevelopenAccessfi
dc.relation.conferenceInternational Symposium on Negative Ions, Beams and Sources
dc.subject.ysoplasmatekniikka
dc.subject.ysoionit
dc.subject.ysohiili
jyx.subject.urihttp://www.yso.fi/onto/yso/p8568
jyx.subject.urihttp://www.yso.fi/onto/yso/p9015
jyx.subject.urihttp://www.yso.fi/onto/yso/p138
dc.relation.doi10.1063/1.4995777


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