Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D. C., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D. M., Hwang, C. S., Jen, S.-H., Kallio, T., . . . Yurkevich, O. (2017). Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”. Journal of Vacuum Science and Technology A, 35(1), Article 010801. https://doi.org/10.1116/1.4971389
Julkaistu sarjassa
Journal of Vacuum Science and Technology ATekijät
Päivämäärä
2017Tekijänoikeudet
© 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution(CC BY) license.
Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated,
self-terminating gas–solid reactions, has become the method of choice in semiconductor
manufacturing and many other technological areas for depositing thin conformal inorganic material
layers for various applications. ALD has been discovered and developed independently, at
least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating
back to 1974 in Finland, has been commonly known as the origin of ALD, while work done
since the 1960s in the Soviet Union under the name “molecular layering” (and sometimes other
names) has remained much less known. The virtual project on the history of ALD (VPHA) is a
volunteer-based effort with open participation, set up to make the early days of ALD more transparent.
In VPHA, started in July 2013, the target is to list, read and comment on all early ALD
academic and patent literature up to 1986. VPHA has resulted in two essays and several presentations
at international conferences. This paper, based on a poster presentation at the 16th
International Conference on Atomic Layer Deposition in Dublin, Ireland, 2016, presents a recommended
reading list of early ALD publications, created collectively by the VPHA participants
through voting. The list contains 22 publications from Finland, Japan, Soviet Union, United
Kingdom, and United States. Up to now, a balanced overview regarding the early history of ALD
has been missing; the current list is an attempt to remedy this deficiency.
...
![showless](/themes/JYX2//images/showless.png)
![showmore](/themes/JYX2//images/showmore.png)
Julkaisija
AIP PublishingISSN Hae Julkaisufoorumista
0734-2101Julkaisu tutkimustietojärjestelmässä
https://converis.jyu.fi/converis/portal/detail/Publication/26463854
Metadata
Näytä kaikki kuvailutiedotKokoelmat
Lisenssi
Ellei muuten mainita, aineiston lisenssi on © 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution(CC BY) license.
Samankaltainen aineisto
Näytetään aineistoja, joilla on samankaltainen nimeke tai asiasanat.
-
Low-Temperature Atomic Layer Deposition of High-k SbOx for Thin Film Transistors
Yang, Jun; Bahrami, Amin; Ding, Xingwei; Zhao, Panpan; He, Shiyang; Lehmann, Sebastian; Laitinen, Mikko; Julin, Jaakko; Kivekäs, Mikko; Sajavaara, Timo; Nielsch, Kornelius (Wiley-VCH Verlag, 2022)SbOx thin films are deposited by atomic layer deposition (ALD) using SbCl5 and Sb(NMe2)3 as antimony reactants and H2O and H2O2 as oxidizers at low temperatures. SbCl5 can react with both oxidizers, while no deposition is ... -
Let the best story win : evaluation of the most cited business history articles
Ojala, Jari; Eloranta, Jari; Ojala, Anu; Valtonen, Heli (Taylor & Francis, 2017)Faced with intensifying competition for scientific impact measured in terms of citation counts, small disciplines are challenged to prove their importance as they lack the critical mass to accumulate large numbers of ... -
Virtual Museum and Small Museums : ViMuseo.fi Project
Laine-Zamojska, Magdalena (Archives & Museum Informatics, 2011)New media are a huge opportunity and challenge for museums, especially for small institutions without digitized resources. The ViMuseo.fi is a research project conducted at the University of Jyväskylä, Finland. The research ... -
The use of Electronic Information Systems in social work : A scoping review of the empirical articles published between 2000 and 2019
Ylönen, Katri (Routledge, 2023)Sähköisiä tietojärjestelmiä käytetään laajasti sosiaalityössä, mutta empiirisiä tutkimustuloksia niiden käytöstä ei ole vielä analysoitu ja levitetty. Tässä kartoittavassa kirjallisuuskatsauksessa tarkasteltiin vuosien ... -
Highly cited educational technology journal articles : a descriptive and critical analysis
Mertala, Pekka; Moens, Eleni; Teräs, Marko (Routledge, 2022)Citations are valuable capital in the academy as the number of citations is the most frequently used indicator in evaluating the quality of papers, journals, researchers, and universities. Thus, the characteristics of ...
Ellei toisin mainittu, julkisesti saatavilla olevia JYX-metatietoja (poislukien tiivistelmät) saa vapaasti uudelleenkäyttää CC0-lisenssillä.