Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays : Extending the Limits of Nondestructive Analysis
Palosaari, M., Käyhkö, M., Kinnunen, K., Laitinen, M., Julin, J., Malm, J., Sajavaara, T., Doriese, W. B., Fowler, J., Reintsema, C., Swetz, D., Schmidt, D., Ullom, J. N., & Maasilta, I. (2016). Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays : Extending the Limits of Nondestructive Analysis. Physical Review Applied, 6(2), Article 024002. https://doi.org/10.1103/PhysRevApplied.6.024002
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Physical Review AppliedAuthors
Date
2016Copyright
© 2016 American Physical Society. Published in this repository with the kind permission of the publisher.
Nondestructive analysis (NDA) based on x-ray emission is widely used, for example, in the
semiconductor and concrete industries. Here, we demonstrate significant quantitative and qualitative
improvements in broadband x-ray NDA by combining particle-induced emission with detection based on
superconducting microcalorimeter arrays. We show that the technique offers great promise in the elemental
analysis of thin-film and bulk samples, especially in the difficult cases where tens of different elements with
nearly overlapping emission lines have to be identified down to trace concentrations. We demonstrate the
efficiency and resolving capabilities by spectroscopy of several complex multielement samples in the
energy range 1–10 keV, some of which have a trace amount of impurities not detectable with standard
silicon drift detectors. The ability to distinguish the chemical environment of an element is also
demonstrated by measuring the intensity differences and chemical shifts of the characteristics x-ray
peaks of titanium compounds. In particular, we report measurements of the Kα=Kβ intensity ratio of thin
films of TiN and measurements of Ti Kα satellite peak intensities in various Ti thin-film compounds. We
also assess the detection limits of the technique, comment on detection limits possible in the future, and
discuss possible applications.
...
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American Physical SocietyISSN Search the Publication Forum
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