MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

dc.contributor.author	Gorelick, Sergey
dc.date.accessioned	2008-09-16T10:38:08Z
dc.date.available	2008-09-16T10:38:08Z
dc.date.issued	2008
dc.identifier.isbn	978-951-39-3318-0
dc.identifier.other	oai:jykdok.linneanet.fi:1069270
dc.identifier.uri	https://jyx.jyu.fi/handle/123456789/18901
dc.description.abstract		en
dc.format.extent	65 sivua
dc.language.iso	eng
dc.publisher	University of Jyväskylä
dc.relation.ispartofseries	Research report / Department of Physics, University of Jyväskylä
dc.relation.isversionof	ISBN 978-951-39-3317-3
dc.rights	In Copyright
dc.title	MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics
dc.type	doctoral thesis
dc.identifier.urn	URN:ISBN:978-951-39-3318-0
dc.type.dcmitype	Text	en
dc.type.ontasot	Väitöskirja	fi
dc.type.ontasot	Doctoral dissertation	en
dc.contributor.tiedekunta	Matemaattis-luonnontieteellinen tiedekunta	fi
dc.contributor.tiedekunta	Faculty of Mathematics and Science	en
dc.contributor.yliopisto	University of Jyväskylä	en
dc.contributor.yliopisto	Jyväskylän yliopisto	fi
dc.contributor.oppiaine	Fysiikka	fi
dc.type.coar	http://purl.org/coar/resource_type/c_db06
dc.relation.issn	0075-465X
dc.relation.numberinseries	9/2008
dc.rights.accesslevel	openAccess
dc.type.publication	doctoralThesis
dc.subject.yso	fysiikka
dc.rights.url	https://rightsstatements.org/page/InC/1.0/

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