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MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

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Published in
Research report / Department of Physics, University of Jyväskylä
Authors
Gorelick, Sergey
Date
2008
Discipline
Fysiikka

 
 
Publisher
University of Jyväskylä
ISBN
978-951-39-3318-0
ISSN Search the Publication Forum
0075-465X
Keywords
fysiikka
URI

http://urn.fi/URN:ISBN:978-951-39-3318-0

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  • Väitöskirjat [3229]

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