MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics

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Published in

Research report / Department of Physics, University of Jyväskylä

Authors

Gorelick, Sergey

Date

2008

Discipline

Fysiikka

 

 

Publisher

University of Jyväskylä

ISBN

978-951-39-3318-0

ISSN Search the Publication Forum

0075-465X

Keywords

fysiikka

URI

http://urn.fi/URN:ISBN:978-951-39-3318-0

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