MeV ion beam lithography of high aspect ratio structures with a focused or aperture-shaped beam for applications in biomedical studies and microfluidics
Publisher
University of JyväskyläISBN
978-951-39-3318-0ISSN Search the Publication Forum
0075-465XKeywords
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- Väitöskirjat [3598]
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Except where otherwise noted, this item's license is described as In Copyright