THF cleaning for PMMA residue removal from graphene
Authors
Date
2024Copyright
This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.
In this work the effectiveness on tetrahydrofuran cleaning on PMMA residues left
behind from the polymer supported transfer process of CVD grown graphene and
its ability to remove surface doping from graphene were studied. The electronic
properties of the studied graphene Hall bar devices fabricated on a silicon dioxide
substrate were charted during different points of the cleaning process. The amount
of surface doping and the quality of the graphene was estimated using Raman
spectroscopy and the amount of PMMA residues was estimated using atomic force
microscopy. The electrical measurements and Raman spectroscopy showed that
before cleaning the devices were highly p-doped and that the doping was reduced
as a result of the cleaning. The suitability studied cleaning process for PMMA
residue removal could not be conclusively estimated from the obtained results, but
the process showed promise for removing ambient surface doping.
Keywords
Metadata
Show full item recordCollections
- Pro gradu -tutkielmat [29111]
Related items
Showing items with similar title or keywords.
-
Graphene transfer process based on gels.
Neuvonen, Santeri (2023)In this thesis, we suggest an alternative approach to graphene transfer by using gel materials as a support layer. The literature section focuses on graphene and its properties to find the optimal gel for the graphene ... -
Paraffin assisted graphene transfer
Thakur, Abhishek (2023)In this master’s thesis, we propose Paraffin support layer as an alternative to the well established and widely used PMMA for CVD grown Graphene transfer process. The motivation behind the project being to eliminate the ... -
Synthesis, characterisation and reactivity of a zinc triazenide for potential use in vapour deposition
Samii, Rouzbeh; Barkas, Essi; Zanders, David; Fransson, Anton; Lahtinen, Manu; Kessler, Vadim; Tuononen, Heikki M.; Moilanen, Jani O.; O'Brien, Nathan J. (Royal Society of Chemistry, 2024)In this study, we synthesised and characterised a new zinc(II) triazenide for potential use in vapour deposition of zinc sulphide thin films. The compound is volatile and quantitatively sublimes at 80 °C under vacuum (0.5 ... -
Area‐Selective Atomic Layer Deposition on Functionalized Graphene Prepared by Reversible Laser Oxidation
Mentel, Kamila K.; Emelianov, Aleksei V.; Philip, Anish; Johansson, Andreas; Karppinen, Maarit; Pettersson, Mika (Wiley, 2022)Area-selective atomic layer deposition (ALD) is a promising “bottom-up” alternative to current nanopatterning techniques. While it has been successfully implemented in traditional microelectronic processes, selective ... -
The role of oxidation treatments before and after CVD synthesis of graphene on copper catalytic surface
Neuvonen, Santeri (2021)Graphene is a sheet of honeycomb bonded carbon, that is only one atom thick. Aside from its remarkable strength, graphene has great conducting and photochemical prop erties. Due to its unique properties, it can be used ...