Kilpi, Lauri; Ylivaara, Oili M. E.; Vaajoki, Antti; Malm, Jari; Sintonen, Sakari; Tuominen, Marko; Puurunen, Riikka L.; Ronkainen, Helena (American Institute of Physics, 2016)
The scratch test method is widely used for adhesion evaluation of thin films and coatings. Usual
critical load criteria designed for scratch testing of coatings were not applicable to thin atomic
layer deposition (ALD) ...
