Transition-edge sensors for particle-induced X-ray emission spectrometry

A transition-edge sensor array has been applied to particle-induced X-ray emission. We have characterized the detector for quantitative analysis and obtained minimum detection limit over two orders of magnitude better compared to a silicon drift detector. We have also studied chemical effects in analysis of Ti, TiO2 and TiN using proton and heavy ion beams. A chemical shift for TiO2 was observed in proton measurements, and relative multiple ionization X-ray satellite line intensities changed between metallic Ti and other compounds with heavy ions. Detection of low energy X-rays down to 0.5 keV was achieved by installing a polycapillary lens in front of the transition-edge sensor array in external beam measurement setup. We developed a software for TES data analysis, including features such as graphical user interface, automated energy calibration, fitting of high-resolution spectra, and quantitative elemental analysis.