| dc.contributor.author | Kinnunen, Sami | |
| dc.contributor.author | Malm, Jari | |
| dc.contributor.author | Arstila, Kai | |
| dc.contributor.author | Lahtinen, Manu | |
| dc.contributor.author | Sajavaara, Timo | |
| dc.date.accessioned | 2017-11-14T11:22:51Z | |
| dc.date.available | 2017-11-14T11:22:51Z | |
| dc.date.issued | 2017 | |
| dc.identifier.citation | Kinnunen, S., Malm, J., Arstila, K., Lahtinen, M., & Sajavaara, T. (2017). Characterization of ALD grown TixAlyN and TixAlyC thin films. <i>Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms</i>, <i>406</i>(Part A), 152-155. <a href="https://doi.org/10.1016/j.nimb.2016.12.032" target="_blank">https://doi.org/10.1016/j.nimb.2016.12.032</a> | |
| dc.identifier.other | CONVID_26539941 | |
| dc.identifier.other | TUTKAID_72937 | |
| dc.identifier.uri | https://jyx.jyu.fi/handle/123456789/55870 | |
| dc.description.abstract | Atomic layer deposition (ALD) was used to grow TixAlyN and TixAlyC thin films using trimethylaluminum (TMA), titanium tetrachloride and ammonia as precursors. Deposition temperature was varied between 325 °C and 500 °C. Films were also annealed in vacuum and N2-atmosphere at 600–1000 °C. Wide range of characterization methods was used including time-of-flight elastic recoil detection analysis (ToF-ERDA), X-ray diffractometry (XRD), X-ray reflectometry (XRR), Raman spectroscopy, ellipsometry, helium ion microscopy (HIM), atomic force microscopy (AFM) and 4-point probe measurement for resistivity. Deposited films were roughly 100 nm thick and contained mainly desired elements. Carbon, chlorine and hydrogen were found to be the main impurities. | |
| dc.language.iso | eng | |
| dc.publisher | Elsevier B.V. | |
| dc.relation.ispartofseries | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | |
| dc.subject.other | ALD | |
| dc.subject.other | MAX-phases | |
| dc.subject.other | ToF-ERDA | |
| dc.title | Characterization of ALD grown TixAlyN and TixAlyC thin films | |
| dc.type | article | |
| dc.identifier.urn | URN:NBN:fi:jyu-201710254061 | |
| dc.contributor.laitos | Fysiikan laitos | fi |
| dc.contributor.laitos | Kemian laitos | fi |
| dc.contributor.laitos | Department of Physics | en |
| dc.contributor.laitos | Department of Chemistry | en |
| dc.contributor.oppiaine | Fysiikka | fi |
| dc.contributor.oppiaine | Epäorgaaninen ja analyyttinen kemia | fi |
| dc.contributor.oppiaine | Kiihdytinlaboratorio | fi |
| dc.contributor.oppiaine | Physics | en |
| dc.contributor.oppiaine | Inorganic and Analytical Chemistry | en |
| dc.contributor.oppiaine | Accelerator Laboratory | en |
| dc.type.uri | http://purl.org/eprint/type/JournalArticle | |
| dc.date.updated | 2017-10-25T06:15:04Z | |
| dc.type.coar | http://purl.org/coar/resource_type/c_2df8fbb1 | |
| dc.description.reviewstatus | peerReviewed | |
| dc.format.pagerange | 152-155 | |
| dc.relation.issn | 0168-583X | |
| dc.relation.numberinseries | Part A | |
| dc.relation.volume | 406 | |
| dc.type.version | submittedVersion | |
| dc.rights.copyright | © 2017 Elsevier Ltd. This is a pre-print version of an article whose final and definitive form has been published by Elsevier. Published in this repository with the kind permission of the publisher. | |
| dc.rights.accesslevel | openAccess | fi |
| dc.relation.doi | 10.1016/j.nimb.2016.12.032 | |
| dc.type.okm | A1 | |
