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Studies on atomic layer deposition of IRMOF-8 thin films

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Salmi, L., Heikkilä, M., Vehkamäki, M., Puukilainen, E., Ritala, M., & Sajavaara, T. (2015). Studies on atomic layer deposition of IRMOF-8 thin films. Journal of Vacuum Science and Technology A, 33(1), Article 01A121. https://doi.org/10.1116/1.4901455
Published in
Journal of Vacuum Science and Technology A
Authors
Salmi, Leo |
Heikkilä, Mikko |
Vehkamäki, Marko |
Puukilainen, Esa |
Ritala, Mikko |
Sajavaara, Timo
Date
2015
Discipline
FysiikkaKiihdytinlaboratorioPhysicsAccelerator Laboratory
Copyright
© 2014 American Vacuum Society. Published by AIP. Published in this repository with the kind permission of the publisher.

 
Deposition of IRMOF-8 thin films by atomic layer deposition was studied at 260–320 C. Zinc acetate and 2,6-naphthalenedicarboxylic acid were used as the precursors. The as-deposited amorphous films were crystallized in 70% relative humidity at room temperature resulting in an unknown phase with a large unit cell. An autoclave with dimethylformamide as the solvent was used to recrystallize the films into IRMOF-8 as confirmed by grazing incidence x-ray diffraction. The films were further characterized by high temperature x-ray diffraction (HTXRD), field emission scanning electron microscopy, Fourier transform infrared spectroscopy (FTIR), time-of-flight elastic recoil detection analysis (TOF-ERDA), nanoindentation, and energy-dispersive x-ray spectroscopy. HTXRD measurements revealed similar behavior to bulk IRMOF-8. According to TOFERDA and FTIR, composition of the films was similar to IRMOF-8. Through-porosity was confirmed by loading the films with palladium using Pd(thd)2 (thd ¼ 2,2,6,6-tetramethyl-3, 5-heptanedionato) as the precursor. ...
Publisher
American Institute of Physics
ISSN Search the Publication Forum
0734-2101
Keywords
amorphous films energy dispersive spectroscopy field emission microscopes fourier transform infrared spectroscopy scanning electron microscopy X-ray diffraction X-ray spectroscopy zinc compounds atomikerroskasvatus kuormaus palladium ohutkalvot
DOI
https://doi.org/10.1116/1.4901455
URI

http://urn.fi/URN:NBN:fi:jyu-201601211230

Publication in research information system

https://converis.jyu.fi/converis/portal/detail/Publication/24008703

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