Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma

Abstract
A plasma diagnostic study of the Ion Energy Distribution Functions (IEDFs) of H+, H+2H2+, and H+3H3+ ions in a 2.45 GHz hydrogen plasma reactor called TIPS is presented. The measurements are conducted by using a Plasma Ion Mass Spectrometer with an energy sector and a quadrupole detector from HIDEN Analytical Limited in order to select an ion species and to measure its energy distribution. The reactor is operated in the pulsed mode at 100 Hz with a duty cycle of 10% (1 ms pulse width). The IEDFs of H+, H+2H2+, and H+3H3+ are obtained each 5 μs with 1 μs time resolution throughout the entire pulse. The temporal evolution of the plasma potential and ion temperature of H+ is derived from the data. It is shown that the plasma potential is within the range of 15–20 V, while the ion temperature reaches values of 0.25–1 eV during the pulse and exhibits a fast transient peak when the microwave radiation is switched off. Finally, the ion temperatures are used to predict the transverse thermal emittance of a proton beam extracted from 2.45 GHz microwave discharges.
Main Authors
Format
Articles Research article
Published
2017
Series
Subjects
Publication in research information system
Publisher
AIP Publishing LLC
The permanent address of the publication
https://urn.fi/URN:NBN:fi:jyu-201711144250Use this for linking
Review status
Peer reviewed
ISSN
1070-664X
DOI
https://doi.org/10.1063/1.5001488
Language
English
Published in
Physics of Plasmas
Citation
  • Megía-Macías, A., Cortázar, O. D., Tarvainen, O., & Koivisto, H. (2017). Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma. Physics of Plasmas, 24(11), Article 113501. https://doi.org/10.1063/1.5001488
License
Open Access
Funder(s)
European Commission
Funding program(s)
Research infrastructures, H2020
Research infrastructures, H2020
European Commission
Additional information about funding
This project received funding from the European Union’s Horizon 2020 research and innovation programme under Grant Agreement No. 654002.
Copyright© AIP Publishing, 2017. Published in this repository with the kind permission of the publisher.

Share